FC2000 PVD Tool

FC2000The FC2000 is a fully automated electronbeam PVD evaporation system evaporation of nearly all materials used for both high end R&D and production environments


The FC2000 PVD system provides:

– Full integrated and automated deposition system, including datalogging of deposition parameters, development of deposition recipes and automated control of all functionality of pumps, valves, guns, ionsource, sample heating, cooling, etc.

– Excellent access of the e-gun through swingout electronbeam gun chamber

– Reliable highvacuum pumpingsystem with cryopump and compressor

– Extreme fast pumpdown through loadlocked sampleholder chamber

– Excellent uniformity by Rotary sample holder and >50cm Source to Substrate distance

– Virtual no cross-contamination between materials by unique turretgun design

– Reliable and powerfull High Voltage powersupply, 6, 12 or 15kW.


Technical Specification:

– 500 mm hinged loadlock belljar

– ultimate vacuum < 5E-8 mbar

– 550 mm Source-to-Substrate distance

– Temescal STIH270-2 poptop egun, with 6kW high voltage powersupply

– Dry backingpump 40 m3/hr

– Cryopump 1500 l/sec

– PLC control with touchscreen

– Inficon deposition controller