CF300 UHV Depositionchamber:
- Diameter 300mm, 600 mm long
- Including Ebeam turretgun, 10kW
- Indexer for 4-pocket turretgun
- Sweepcontroller for ebeam deflection
- Viewpoort with Teflon spool and shutter
- CF sealed
- E-gun with easy access
- Watercooled shielding