DN300CF Depositionchamber

CF300 UHV Depositionchamber:UHV 300mm Depositiekamer 2

  • Diameter 300mm, 600 mm long
  • Including Ebeam turretgun, 10kW
  • Indexer for 4-pocket turretgun
  • Sweepcontroller for ebeam deflection
  • Viewpoort with Teflon spool and shutter
  • CF sealed
  • E-gun with easy access
  • Watercooled shielding