The COAT320 is a very user-friendly evaporator. This evparotor is provided with 1, 2 or 3 thermal sources for boats or filaments, a quartzcrystal, depositioncontroller, fully automated PLC control and a oil and maintenance free highvacuum turbopumpsystem. The belljar chamber is provide with an elektrical lift, a viewing window and is o-ring sealed.
– easy control with intiutive menu’s
– automatic deposition control with one-touch start/stop
– maintenance free pumping system
– compact design, frame with wheels
– Inficon SQC310 depositioncontroller
– PLC570 with touchscreen
– Oliefree backingpump, 6 m3/hr
– Belljar 320mm with 2 thermal sources, shielding, automatic shutter
Optional: Rotary sample holder, extra source, datalogging, etc.