COAT340, integrated in glovebox

The COAT340 is an integrated evaporation system into a glovebox. The evaporation system is provided with 4 thermal sources, 2 quartzcrystals, depositioncontroller, fully automated control and completely dry and maintenance free turbopumpsystem.

Features:

– high unifomity (~5%)

– fast pumpdown (<10 minutes to 5E-7 mbar)

– easy control with intuitive menu’s

– maintenance free

– datalogging

Technical Specifications:

– SQC310 depositioncontroller

– PLC1040 control with touchscreen

– Oilfree vacuumpumpsystem incl. backingpump 10m3/hr, turbopump 300ltr/sec

– Belljar 340mm with 4 thermal sources, shielding, shutter

– Rotary sampleholder for 9 substrates (35x35mm)

– Ultimate vacuum < 8E-8 mbar